JPH0554621B2 - - Google Patents

Info

Publication number
JPH0554621B2
JPH0554621B2 JP60064896A JP6489685A JPH0554621B2 JP H0554621 B2 JPH0554621 B2 JP H0554621B2 JP 60064896 A JP60064896 A JP 60064896A JP 6489685 A JP6489685 A JP 6489685A JP H0554621 B2 JPH0554621 B2 JP H0554621B2
Authority
JP
Japan
Prior art keywords
detection means
detection
substrate
scattered light
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60064896A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61223541A (ja
Inventor
Juichiro Yamazaki
Motosuke Myoshi
Katsuya Okumura
Shigeru Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP60064896A priority Critical patent/JPS61223541A/ja
Priority to KR1019860002296A priority patent/KR910000794B1/ko
Priority to US06/844,601 priority patent/US4902131A/en
Priority to EP86104444A priority patent/EP0200918B1/en
Priority to DE8686104444T priority patent/DE3673226D1/de
Publication of JPS61223541A publication Critical patent/JPS61223541A/ja
Publication of JPH0554621B2 publication Critical patent/JPH0554621B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP60064896A 1985-03-28 1985-03-28 表面検査方法および装置 Granted JPS61223541A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60064896A JPS61223541A (ja) 1985-03-28 1985-03-28 表面検査方法および装置
KR1019860002296A KR910000794B1 (ko) 1985-03-28 1986-03-27 기판의 표면검사방법 및 장치
US06/844,601 US4902131A (en) 1985-03-28 1986-03-27 Surface inspection method and apparatus therefor
EP86104444A EP0200918B1 (en) 1985-03-28 1986-04-01 Surface inspection method and apparatus therefor
DE8686104444T DE3673226D1 (de) 1985-03-28 1986-04-01 Verfahren und vorrichtung zur untersuchung von oberflaechen.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60064896A JPS61223541A (ja) 1985-03-28 1985-03-28 表面検査方法および装置

Publications (2)

Publication Number Publication Date
JPS61223541A JPS61223541A (ja) 1986-10-04
JPH0554621B2 true JPH0554621B2 (en]) 1993-08-13

Family

ID=13271294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60064896A Granted JPS61223541A (ja) 1985-03-28 1985-03-28 表面検査方法および装置

Country Status (1)

Country Link
JP (1) JPS61223541A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022038648A (ja) * 2020-08-27 2022-03-10 信越化学工業株式会社 基板の欠陥検査方法および欠陥検査装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010236968A (ja) * 2009-03-31 2010-10-21 Hitachi High-Technologies Corp 検査方法及び検査装置
CN116067915B (zh) * 2023-02-15 2025-07-15 中国科学院高能物理研究所 光电倍增管表面反射率无损定量检测系统及检测方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5720574B2 (en]) * 1973-11-12 1982-04-30
JPS5611896B2 (en]) * 1974-05-15 1981-03-17
JPS59231405A (ja) * 1983-06-15 1984-12-26 Toshiba Corp 表面欠陥検出器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022038648A (ja) * 2020-08-27 2022-03-10 信越化学工業株式会社 基板の欠陥検査方法および欠陥検査装置

Also Published As

Publication number Publication date
JPS61223541A (ja) 1986-10-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term